Inventor · disambiguated record
Protopopov Vladimir
Also filed as: VLADIMIR PROTOPOPOV
3 granted patents·1 pending application·4 citations·filing 2016–2023
57Inventor score
Files withSAMSUNG ELECTRONICS CO LTD4
Top patents by PatentIndex Score
4 records- 0176US10229818B2Apparatus for monitoring process chamberSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Mar 12, 2019·2 cites·20 claims
- 0274US10249485B2Pulsed plasma analyzer and method for analyzing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Apr 2, 2019·2 cites·19 claims
- 0357US10971343B2Apparatus for monitoring process chamberSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Apr 6, 2021·0 cites·20 claims
- 0452US2024274418A1Plasma density measurement sensor, apparatus for measuring real-time plasma density having the same, and operating method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →