Inventor · disambiguated record

Tatsuya Oh-Hori

Also filed as: OH-HORI TATSUYA

1 granted patent·21 citations·filing 1989–1989

40Inventor score

Technology areasC30B

Files withFUJITSU LTD1

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1 record

0169US4883020AApparatus of metal organic chemical vapor deposition for growing epitaxial layer of compound semiconductorFUJITSU LTD·Filed 1989·Granted Nov 28, 1989·21 cites·23 claims

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