Inventor · disambiguated record

Takayoshi Osakaya

Also filed as: OSAKAYA TAKAYOSHI

1 granted patent·34 citations·filing 1979–1979

45Inventor score

Technology areasG03F

Files withHITACHI LTD1

Top patents by PatentIndex Score

1 record

0182US4298273AProjection aligner and method of positioning a waferHITACHI LTD·Filed 1979·Granted Nov 3, 1981·34 cites·29 claims

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