Inventor · disambiguated record
Marko Peussa
Also filed as: PEUSSA MARKO
5 granted patents·1 pending application·56 citations·filing 2006–2024
78Inventor score
Top patents by PatentIndex Score
6 records- 0194US10468291B2Reaction system for growing a thin filmASM INC·Filed 2016·Granted Nov 5, 2019·11 cites·8 claims
- 0293US8211230B2Reaction system for growing a thin filmVERGHESE MOHITH·Filed 2006·Granted Jul 3, 2012·31 cites·12 claims
- 0391US9359672B2Reaction system for growing a thin filmVERGHESE MOHITH·Filed 2012·Granted Jun 7, 2016·14 cites·9 claims
- 0455US2024343558A1Double layer mems devices and method of manufactureMURATA MANUFACTURING CO·Filed 2024·Application pending·0 cites
- 0552US11685644B2Microelectromechanical device with stopperMURATA MANUFACTURING CO·Filed 2020·Granted Jun 27, 2023·0 cites·2 claims
- 0648US11603312B2MEMS element with increased densityMURATA MANUFACTURING CO·Filed 2020·Granted Mar 14, 2023·0 cites·4 claims
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