Inventor · disambiguated record
Tooru Kitada
Also filed as: KITADA TOORU
2 granted patents·1 pending application·8 citations·filing 2014–2015
53Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0192US9551060B2Film forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 2015·Granted Jan 24, 2017·6 cites·12 claims
- 0270US9567667B2Dual-target sputter deposition with controlled phase difference between target powersTOKYO ELECTRON LTD·Filed 2014·Granted Feb 14, 2017·2 cites·18 claims
- 0330US2016071707A1Processing apparatusTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →