Inventor · disambiguated record

Michelle Lupan

Also filed as: LUPAN MICHELLE

2 granted patents·3 citations·filing 2004–2004

43Inventor score

Technology areasH10P

Files withLAM RES CORP2

Top patents by PatentIndex Score

2 records

0146US7291286B2Methods for removing black silicon and black silicon carbide from surfaces of silicon and silicon carbide electrodes for plasma processing apparatusesLAM RES CORP·Filed 2004·Granted Nov 6, 2007·2 cites·22 claims
0242US7226869B2Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processingLAM RES CORP·Filed 2004·Granted Jun 5, 2007·1 cites·38 claims

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