Inventor · disambiguated record

Thomas Mcclard

Also filed as: MCCLARD THOMAS

1 granted patent·1 citations·filing 2004–2004

16Inventor score

Technology areasH10P

Files withLAM RES CORP1

Top patents by PatentIndex Score

1 record

0142US7226869B2Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processingLAM RES CORP·Filed 2004·Granted Jun 5, 2007·1 cites·38 claims

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