Inventor · disambiguated record
Chisayo Nakayama
Also filed as: NAKAYAMA Chisayo
7 granted patents·2 citations·filing 2017–2019
69Inventor score
Files withSCREEN HOLDINGS CO LTD7
Top patents by PatentIndex Score
7 records- 0176US11107698B2Substrate treating methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Aug 31, 2021·2 cites·5 claims
- 0246US10941492B2Substrate treating methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Mar 9, 2021·0 cites·20 claims
- 0344US10539877B2Developing methodSCREEN HOLDINGS CO LTD·Filed 2019·Granted Jan 21, 2020·0 cites·7 claims
- 0443US10955745B2Exposure device, substrate processing apparatus, exposure method and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Mar 23, 2021·0 cites·22 claims
- 0543US10444636B2Exposure device substrate processing apparatus, exposure method of substrate and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Oct 15, 2019·0 cites·15 claims
- 0641US10900126B2Substrate treating method and apparatus used thereforSCREEN HOLDINGS CO LTD·Filed 2017·Granted Jan 26, 2021·0 cites·10 claims
- 0738US10401736B2Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Sep 3, 2019·0 cites·16 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →