Inventor · disambiguated record
Beom Jin Yoo
Also filed as: YOO BEOM JIN
5 granted patents·10 citations·filing 2018–2021
71Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD5
Top patents by PatentIndex Score
5 records- 0184US10410874B2Plasma processing apparatus and method, and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Sep 10, 2019·5 cites·7 claims
- 0283US11107705B2Cleaning solution production systems and methods, and plasma reaction tanksSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Aug 31, 2021·3 cites·20 claims
- 0373US11545372B2Plasma generator, cleaning liquid processing apparatus, semiconductor device cleaning apparatus, cleaning liquid processing method, and method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Jan 3, 2023·2 cites·17 claims
- 0465US11664242B2Cleaning solution production systems and methods, and plasma reaction tanksSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted May 30, 2023·0 cites·19 claims
- 0543US10418250B2Etching method using remote plasma source, and method of fabricating semiconductor device including the etching methodSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Sep 17, 2019·0 cites·17 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →