Inventor · disambiguated record
Birgit Irmgard Beccard
Also filed as: BECCARD BIRGIT IRMGARD
3 granted patents·6 citations·filing 2015–2015
58Inventor score
Files withAIXTRON SE3
Top patents by PatentIndex Score
3 records- 0183US9942946B2Device for generating vapor from solid or liquid starting material for CVD or PVD apparatusAIXTRON SE·Filed 2015·Granted Apr 10, 2018·3 cites·15 claims
- 0278US10501847B2Apparatus and method for generating a vapor for a CVD or PVD deviceAIXTRON SE·Filed 2015·Granted Dec 10, 2019·2 cites·14 claims
- 0361US10267768B2Device and method for determining the concentration of a vapor by means of an oscillating body sensorAIXTRON SE·Filed 2015·Granted Apr 23, 2019·1 cites·14 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →