Inventor · disambiguated record

Kal Subhadeep

Also filed as: SUBHADEEP KAL

1 granted patent·0 citations·filing 2019–2019

2Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0134US11227767B2Critical dimension trimming method designed to minimize line width roughness and line edge roughnessTOKYO ELECTRON LTD·Filed 2019·Granted Jan 18, 2022·0 cites·19 claims

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