Inventor · disambiguated record
Hirokazu Tokuno
Also filed as: TOKUNO HIROKAZU
18 granted patents·3 pending applications·106 citations·filing 2003–2012
93Inventor score
Files withSPANSION LLC11ADVANCED MICRO DEVICES INC5ADVANCED MICRO DEVICES INC AND SPANSION LLC1CHENG NING1GHANDEHARI KOUROS1
Top patents by PatentIndex Score
21 records- 0189US8367493B1Void free interlayer dielectricSPANSION LLC·Filed 2005·Granted Feb 5, 2013·17 cites·17 claims
- 0286US7534732B1Semiconductor devices with copper interconnects and composite silicon nitride capping layersSPANSION LLC·Filed 2006·Granted May 19, 2009·12 cites·7 claims
- 0385US7538026B1Multilayer low reflectivity hard mask and process thereforADVANCED MICRO DEVICES INC·Filed 2005·Granted May 26, 2009·8 cites·23 claims
- 0484US8415256B1Gap-filling with uniform propertiesNICKEL ALEXANDER·Filed 2010·Granted Apr 9, 2013·9 cites·14 claims
- 0577US7884030B1Gap-filling with uniform propertiesADVANCED MICRO DEVICES INC AND SPANSION LLC·Filed 2006·Granted Feb 8, 2011·7 cites·14 claims
- 0676US7307027B1Void free interlayer dielectricADVANCED MICRO DEVICES INC·Filed 2005·Granted Dec 11, 2007·5 cites·11 claims
- 0774US7341956B1Disposable hard mask for forming bit linesSPANSION LLC·Filed 2005·Granted Mar 11, 2008·4 cites·19 claims
- 0874US7238571B1Non-volatile memory device with increased reliabilitySPANSION LLC·Filed 2005·Granted Jul 3, 2007·4 cites·18 claims
- 0972US6894342B1Structure and method for preventing UV radiation damage in a memory cell and improving contact CD controlSPANSION LLC·Filed 2003·Granted May 17, 2005·18 cites·12 claims
- 1067US6833581B1Structure and method for preventing process-induced UV radiation damage in a memory cellSPANSION LLC·Filed 2003·Granted Dec 21, 2004·13 cites·13 claims
- 1166US7220643B1System and method for gate formation in a semiconductor deviceSPANSION LLC·Filed 2005·Granted May 22, 2007·3 cites·20 claims
- 1261US8026169B2Cu annealing for improved data retention in flash memory devicesADVANCED MICRO DEVICES INC·Filed 2006·Granted Sep 27, 2011·2 cites·6 claims
- 1360US7927723B1Film stacks to prevent UV-induced device damageSPANSION LLC·Filed 2005·Granted Apr 19, 2011·2 cites·16 claims
- 1459US8048797B2Multilayer low reflectivity hard mask and process thereforADVANCED MICRO DEVICES INC·Filed 2009·Granted Nov 1, 2011·0 cites·10 claims
- 1552US8614475B2Void free interlayer dielectricSPANSION LLC·Filed 2012·Granted Dec 24, 2013·0 cites·20 claims
- 1648US2007029604A1Using thin undoped TEOS with BPTEOS ILD or BPTEOS ILD alone to improve charge loss and contact resistance in multi-bit memory devicesCHENG NING·Filed 2006·Application pending·0 cites
- 1747US8309457B2Multilayer low reflectivity hard mask and process thereforGHANDEHARI KOUROS·Filed 2011·Granted Nov 13, 2012·0 cites·10 claims
- 1845US7157335B1Using thin undoped TEOS with BPTEOS ILD or BPTEOS ILD alone to improve charge loss and contact resistance in multi bit memory devicesSPANSION LLC·Filed 2004·Granted Jan 2, 2007·2 cites·14 claims
- 1943US7888269B2Triple layer anti-reflective hard maskSPANSION LLC·Filed 2005·Granted Feb 15, 2011·0 cites·10 claims
- 2042US2008096364A1Conformal liner for gap-fillingADVANCED MICRO DEVICES INC·Filed 2006·Application pending·0 cites
- 2141US2006214218A1Semiconductor device and method of fabricating the sameSHISHIDO KIYOKAZU·Filed 2005·Application pending·0 cites
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