Inventor · disambiguated record

Ming-Sen Tung

Also filed as: TUNG MING-SEN

1 granted patent·2 citations·filing 2014–2014

19Inventor score

Technology areasG03F

Files withTAIWAN SEMICONDUCTOR MFG CO LTD1

Top patents by PatentIndex Score

1 record

0176US10146141B2Lithography process and system with enhanced overlay qualityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Dec 4, 2018·2 cites·20 claims

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Ming-Sen Tung — Patent Inventor | PatentIndex