Inventor · disambiguated record
Kenneth C. Mcmahon
Also filed as: MCMAHON KENNETH C
4 granted patents·55 citations·filing 2000–2002
79Inventor score
Technology areasH10P
Files withLAM RES CORP4
Top patents by PatentIndex Score
4 records- 0177US6615510B2Wafer drying apparatus and methodLAM RES CORP·Filed 2002·Granted Sep 9, 2003·15 cites·19 claims
- 0277US6446355B1Disk drying apparatus and methodLAM RES CORP·Filed 2000·Granted Sep 10, 2002·16 cites·38 claims
- 0377US6430841B1Apparatus for drying batches of wafersLAM RES CORP·Filed 2000·Granted Aug 13, 2002·15 cites·25 claims
- 0468US6477786B1Apparatus for drying batches of disksLAM RES CORP·Filed 2000·Granted Nov 12, 2002·9 cites·25 claims
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