Inventor · disambiguated record
Han-Ming Sheng
Also filed as: SHENG HAN-MING
6 granted patents·89 citations·filing 1998–2002
83Inventor score
Files withTAIWAN SEMICONDUCTOR MFG6
Top patents by PatentIndex Score
6 records- 0175US6734116B2Damascene method employing multi-layer etch stop layerTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted May 11, 2004·19 cites·14 claims
- 0271US6309944B1Overlay matching method which eliminates alignment induced errors and optimizes lens matchingTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Oct 30, 2001·23 cites·3 claims
- 0350US6252670B1Method for accurately calibrating a constant-angle reflection-interference spectrometer (CARIS) for measuring photoresist thicknessTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Jun 26, 2001·18 cites·16 claims
- 0447US6477265B1System to position defect location on production wafersTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Nov 5, 2002·19 cites·12 claims
- 0541US6330355B1Frame layout to monitor overlay performance of chip composed of multi-exposure imagesTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Dec 11, 2001·10 cites·22 claims
- 0631US6344365B1Arc coating on mask quartz plate to avoid alignment error on stepper or scannerTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Feb 5, 2002·0 cites·14 claims
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