Inventor · disambiguated record
Tsun-Ching Lin
Also filed as: LIN TSUN-CHING
5 granted patents·59 citations·filing 1996–1999
79Inventor score
Top patents by PatentIndex Score
5 records- 0157US5702624ACompete hot plate temperature control system for hot treatmentTAIWAN SEMICONDUCTORS MANFUACT·Filed 1996·Granted Dec 30, 1997·36 cites·6 claims
- 0242US6019849AMethod and apparatus for automatic purge of HMDS vapor pipingTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Feb 1, 2000·11 cites·10 claims
- 0332US5763006AMethod and apparatus for automatic purge of HMDS vapor pipingTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Jun 9, 1998·5 cites·8 claims
- 0430US5908041AMethod for cleaning a photoresist developer spray stream nozzleTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Jun 1, 1999·4 cites·12 claims
- 0522US6020692AMarco lamp life extension in installation for ADI, AEITAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Feb 1, 2000·3 cites·18 claims
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