Inventor · disambiguated record
Young Ki Han
Also filed as: HAN YOUNG-KI
5 granted patents·8 pending applications·48 citations·filing 2002–2016
79Inventor score
Top patents by PatentIndex Score
13 records- 0182US8888950B2Apparatus for plasma processing and method for plasma processingLEE KYUNG HO·Filed 2008·Granted Nov 18, 2014·15 cites·9 claims
- 0281US8373086B2Plasma processing apparatus and method for plasma processingCHARM ENGINEERING CO LTD·Filed 2009·Granted Feb 12, 2013·16 cites·20 claims
- 0376US8105647B2Method of forming oxide film and oxide deposition apparatusLEE JIN-HO·Filed 2007·Granted Jan 31, 2012·4 cites·10 claims
- 0469US6734100B2Method of forming ruthenium thin film using plasma enhanced processJUSUNG ENG CO LTD·Filed 2002·Granted May 11, 2004·12 cites·20 claims
- 0557US8864936B2Apparatus and method for processing substrateHAN YOUNG KI·Filed 2008·Granted Oct 21, 2014·1 cites·9 claims
- 0657US2016160351A1Liner assembly and substrate processing apparatus having the sameCHARM ENGINEERING CO LTD·Filed 2016·Application pending·0 cites
- 0750US2014283746A1Liner assembly and substrate processing apparatus having the sameCHARM ENGINEERING CO LTD·Filed 2013·Application pending·0 cites
- 0848US2016168706A1Liner assembly and substrate processing apparatus having the sameCHARM ENGINEERING CO LTD·Filed 2016·Application pending·0 cites
- 0947US2011049100A1Substrate holder, substrate supporting apparatus, substrate processing apparatus, and substrate processing method using the sameCHARM ENGINEERING CO LTD·Filed 2009·Application pending·0 cites
- 1046US2014332498A1Substrate holder, substrate supporting apparatus, substrate processing apparatus, and substrate processing method using the sameCHARM ENGINEERING CO LTD·Filed 2014·Application pending·0 cites
- 1138US2014251540A1Substrate supporter and substrate processing apparatus including the sameCHARM ENGINEERING CO LTD·Filed 2014·Application pending·0 cites
- 1233US2003215994A1Method for forming ruthenium film of a semiconductor deviceFiled 2003·Application pending·0 cites
- 1328US2015348755A1Gas distribution apparatus and substrate processing apparatus including sameCHARM ENGINEERING CO LTD·Filed 2015·Application pending·0 cites
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