Inventor · disambiguated record
Susumu Makinouchi
Also filed as: MAKINOUCHI SUSUMU
36 granted patents·12 pending applications·957 citations·filing 1988–2018
98Inventor score
Top patents by PatentIndex Score
48 records- 0191US5969800AScanning exposure apparatus and methodNIKON CORP·Filed 1997·Granted Oct 19, 1999·76 cites·46 claims
- 0291US5446519AStage deviceNIKON CORP·Filed 1994·Granted Aug 29, 1995·72 cites·20 claims
- 0391US4801977AProjection optical apparatusNIKON CORP·Filed 1988·Granted Jan 31, 1989·63 cites·10 claims
- 0489US5699145AScanning type exposure apparatusNIKON CORP·Filed 1995·Granted Dec 16, 1997·65 cites·21 claims
- 0587US8760622B2Movable body apparatus, exposure apparatus and pattern formation apparatus, and device manufacturing methodMAKINOUCHI SUSUMU·Filed 2008·Granted Jun 24, 2014·15 cites·45 claims
- 0687US6260282B1Stage control with reduced synchronization error and settling timeNIKON CORP·Filed 1998·Granted Jul 17, 2001·84 cites·20 claims
- 0787US4860374AApparatus for detecting position of reference patternNIKON CORP·Filed 1988·Granted Aug 22, 1989·109 cites·7 claims
- 0885US5343270AProjection exposure apparatusNIKON CORP·Filed 1992·Granted Aug 30, 1994·40 cites·14 claims
- 0984US8208128B2Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing methodMAKINOUCHI SUSUMU·Filed 2009·Granted Jun 26, 2012·12 cites·66 claims
- 1083US5907392AExposure apparatusNIKON CORP·Filed 1996·Granted May 25, 1999·47 cites·17 claims
- 1181US8064037B2Immersion exposure apparatus and device manufacturing method with no liquid recovery during exposureNAGASAKA HIROYUKI·Filed 2006·Granted Nov 22, 2011·4 cites·27 claims
- 1281US5877845AScanning exposure apparatus and methodNIPPON KOGAKU KK·Filed 1997·Granted Mar 2, 1999·45 cites·19 claims
- 1380US5978071AProjection exposure apparatus and method in which mask stage is moved to provide alignment with a moving wafer stageNIKON CORP·Filed 1998·Granted Nov 2, 1999·43 cites·53 claims
- 1480US5742376AProjection exposure apparatus and projection exposure methodNIKON CORP·Filed 1996·Granted Apr 21, 1998·46 cites·20 claims
- 1580US5483311AProjection exposure apparatusNIKON CORP·Filed 1994·Granted Jan 9, 1996·29 cites·19 claims
- 1679US4958082APosition measuring apparatusNIKON CORP·Filed 1988·Granted Sep 18, 1990·30 cites·18 claims
- 1778US5677754AScanning exposure apparatusNIKON CORP·Filed 1995·Granted Oct 14, 1997·41 cites·57 claims
- 1877US6188464B1Exposure apparatusNIKON CORP·Filed 1999·Granted Feb 13, 2001·32 cites·17 claims
- 1975US6490025B1Exposure apparatusNIKON CORP·Filed 1998·Granted Dec 3, 2002·36 cites·30 claims
- 2071US7932996B2Exposure apparatus, exposure method, and device fabrication methodNIKON CORP·Filed 2006·Granted Apr 26, 2011·2 cites·23 claims
- 2170US7601947B2Encoder that optically detects positional information of a scaleNIKON CORP·Filed 2007·Granted Oct 13, 2009·5 cites·9 claims
- 2270US6259511B1Scanning type exposure apparatusNIKON CORP·Filed 1999·Granted Jul 10, 2001·24 cites·51 claims
- 2369US8395110B2Encoder apparatus using liquid to suppress detection failureMAKINOUCHI SUSUMU·Filed 2010·Granted Mar 12, 2013·2 cites·36 claims
- 2467US8222594B2Encoder that optically detects positional information of a movable body by changing a path length through periodic oscillation of an optical elementMAKINOUCHI SUSUMU·Filed 2010·Granted Jul 17, 2012·2 cites·15 claims
- 2564US6633363B1Scanning exposure apparatus and methodNIKON CORP·Filed 2000·Granted Oct 14, 2003·6 cites·28 claims
- 2661US2017299966A1Exposure apparatus, exposure method and device manufacturing methodNIKON CORP·Filed 2017·Application pending·0 cites
- 2759US6646715B1Scanning exposure apparatus and method with run-up distance controlNIKON CORP·Filed 2000·Granted Nov 11, 2003·5 cites·14 claims
- 2857US7723671B2Positional information detecting deviceNIKON CORP·Filed 2008·Granted May 25, 2010·2 cites·13 claims
- 2954US2012292539A1EncoderMAKINOUCHI SUSUMU·Filed 2012·Application pending·0 cites
- 3053US8797506B2Exposure apparatus, exposure method, and device fabrication methodIMAI MOTOKATSU·Filed 2012·Granted Aug 5, 2014·0 cites·55 claims
- 3153US8796613B2Encoder apparatus using liquid to suppress detection failureNIKON CORP·Filed 2012·Granted Aug 5, 2014·0 cites·7 claims
- 3253US8390780B2Movable-body apparatus, exposure apparatus, exposure method, and device manufacturing methodMAKINOUCHI SUSUMU·Filed 2008·Granted Mar 5, 2013·1 cites·69 claims
- 3351US5777721AExposure method and apparatus with control of a linear motorNIKON CORP·Filed 1995·Granted Jul 7, 1998·10 cites·7 claims
- 3449US8272544B2Exposure apparatus, exposure method, and device fabrication methodIMAI MOTOKATSU·Filed 2011·Granted Sep 25, 2012·0 cites·14 claims
- 3549US2009267781A1EncoderNIKON CORP·Filed 2009·Application pending·0 cites
- 3644US5714860AStage device capable of applying a damping force to a movable memberNIKON CORP·Filed 1995·Granted Feb 3, 1998·8 cites·12 claims
- 3743US2019029090A1Light irradiation system, control apparatus, light irradiation control method, and operating microscope apparatusAIST·Filed 2018·Application pending·0 cites
- 3843US2007236854A1Anti-Gravity Device for Supporting Weight and Reducing TransmissibilityLEE MARTIN E·Filed 2006·Application pending·0 cites
- 3942US8710426B2Encoder that detects positional information of a moving body generating interference fringes that move in opposite directionsMAKINOUCHI SUSUMU·Filed 2011·Granted Apr 29, 2014·0 cites·11 claims
- 4042US8710425B2Encoder that optically detects positional information of a moving body from different optical paths lengthsMAKINOUCHI SUSUMU·Filed 2011·Granted Apr 29, 2014·0 cites·15 claims
- 4142US2017079741A1Scanning projection apparatus, projection method, surgery support system, and scanning apparatusNIKON CORP·Filed 2016·Application pending·0 cites
- 4240US2018288404A1Image processing system, image processing apparatus, projecting apparatus, and projection methodAIST·Filed 2018·Application pending·0 cites
- 4340US2008185506A1EncoderSENDAI NIKON CORP·Filed 2008·Application pending·0 cites
- 4439US2005231706A1Feedforward control with reduced learning time for lithographic system to improve throughput and accuracyNIKON CORP·Filed 2004·Application pending·0 cites
- 4539US2007097340A1Active damper with counter mass to compensate for structural vibrations of a lithographic systemNIKON CORP·Filed 2005·Application pending·0 cites
- 4636US2004128918A1Control system and method for improving tracking accuracy of a stage through processing of information from previous operationsFiled 2003·Application pending·0 cites
- 4736US2016139039A1Imaging system and imaging methodNAT INST OF ADVANCED IND SCIEN·Filed 2015·Application pending·0 cites
- 4832US6337733B1Apparatus including a motor-driven stage for exposing a photosensitive substrate, and method of making such apparatusNIKON CORP·Filed 1999·Granted Jan 8, 2002·1 cites·58 claims
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