Inventor · disambiguated record
Hidenobu Miyamoto
Also filed as: MIYAMOTO HIDENOBU
14 granted patents·307 citations·filing 1991–2007
94Inventor score
Top patents by PatentIndex Score
14 records- 0194US5690781APlasma processing apparatus for manufacture of semiconductor devicesNEC CORP·Filed 1995·Granted Nov 25, 1997·105 cites·11 claims
- 0287US7180191B2Semiconductor device and method of manufacturing a semiconductor deviceNEC ELECTRONICS CORP·Filed 2005·Granted Feb 20, 2007·14 cites·20 claims
- 0383US7615498B2Method of manufacturing a semiconductor deviceNEC ELECTRONICS CORP·Filed 2007·Granted Nov 10, 2009·10 cites·6 claims
- 0471US5937300ASemiconductor apparatus and fabrication method thereofNEC CORP·Filed 1997·Granted Aug 10, 1999·40 cites·11 claims
- 0565US5846331APlasma processing apparatusNEC CORP·Filed 1997·Granted Dec 8, 1998·32 cites·17 claims
- 0664US6319844B1Method of manufacturing semiconductor device with via holes reaching interconnect layers having different top-surface widthsNEC CORP·Filed 2000·Granted Nov 20, 2001·9 cites·19 claims
- 0763US7341937B2Semiconductor device and method of manufacturing sameNEC ELECTRONICS CORP·Filed 2005·Granted Mar 11, 2008·2 cites·23 claims
- 0862US6927495B2Semiconductor device and method of manufacturing sameNEC ELECTRONICS CORP·Filed 2003·Granted Aug 9, 2005·9 cites·4 claims
- 0956US5407862AMethod for manufacturing fine-structured stacked connection layerNEC CORP·Filed 1993·Granted Apr 18, 1995·17 cites·16 claims
- 1054US5645683AEtching method for etching a semiconductor substrate having a silicide layer and a polysilicon layerNEC CORP·Filed 1995·Granted Jul 8, 1997·19 cites·8 claims
- 1148US5810932APlasma generating apparatus used for fabrication of semiconductor deviceNEC CORP·Filed 1996·Granted Sep 22, 1998·18 cites·9 claims
- 1248US5340769AMethod for manufacturing semiconductor device having groove-structured isolationNEC CORP·Filed 1993·Granted Aug 23, 1994·13 cites·10 claims
- 1339US5792710AMethod for selectively etching polycide layerNEC CORP·Filed 1997·Granted Aug 11, 1998·10 cites·7 claims
- 1437US5246888AMethod of preventing corrosion of aluminum alloysNEC CORP·Filed 1991·Granted Sep 21, 1993·9 cites·2 claims
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