Inventor · disambiguated record
Brian Lu
Also filed as: LU BRIAN · LU BRIAN G
18 granted patents·5 pending applications·2,687 citations·filing 2003–2024
96Inventor score
Top patents by PatentIndex Score
23 records- 0198US8187951B1CVD flowable gap fillWANG FENG·Filed 2009·Granted May 29, 2012·550 cites·12 claims
- 0298US7629227B1CVD flowable gap fillNOVELLUS SYSTEMS INC·Filed 2007·Granted Dec 8, 2009·78 cites·23 claims
- 0398US7482247B1Conformal nanolaminate dielectric deposition and etch bag gap fill processNOVELLUS SYSTEMS INC·Filed 2006·Granted Jan 27, 2009·583 cites·27 claims
- 0498US7265061B1Method and apparatus for UV exposure of low dielectric constant materials for porogen removal and improved mechanical propertiesNOVELLUS SYSTEMS INC·Filed 2004·Granted Sep 4, 2007·632 cites·38 claims
- 0598US7208389B1Method of porogen removal from porous low-k films using UV radiationNOVELLUS SYSTEMS INC·Filed 2003·Granted Apr 24, 2007·602 cites·38 claims
- 0696US8146530B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted Apr 3, 2012·22 cites·8 claims
- 0796US7888273B1Density gradient-free gap fillNOVELLUS SYSTEMS INC·Filed 2007·Granted Feb 15, 2011·45 cites·18 claims
- 0894US8215262B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted Jul 10, 2012·15 cites·9 claims
- 0994US8181596B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted May 22, 2012·15 cites·20 claims
- 1094US7381662B1Methods for improving the cracking resistance of low-k dielectric materialsNOVELLUS SYSTEMS INC·Filed 2006·Granted Jun 3, 2008·32 cites·20 claims
- 1193US9257302B1CVD flowable gap fillWANG FENG·Filed 2012·Granted Feb 9, 2016·16 cites·17 claims
- 1293US7094713B1Methods for improving the cracking resistance of low-k dielectric materialsNOVELLUS SYSTEMS INC·Filed 2004·Granted Aug 22, 2006·74 cites·12 claims
- 1387US9159608B2Method for forming TiSiN thin film layer by using atomic layer depositionAIXTRON SE·Filed 2013·Granted Oct 13, 2015·16 cites·7 claims
- 1480US9822451B2Device and method for manufacturing nanostructures consisting of carbonAIXTRON SE·Filed 2014·Granted Nov 21, 2017·2 cites·12 claims
- 1570US7678709B1Method of forming low-temperature conformal dielectric filmsNOVELLUS SYSTEMS INC·Filed 2007·Granted Mar 16, 2010·3 cites·19 claims
- 1663US2023274957A1Multi-station processing chamber for semiconductorPIOTECH CO LTD·Filed 2023·Application pending·0 cites
- 1760US10497591B2Load lock chamber and the cluster tool system using the samePIOTECH CO LTD·Filed 2016·Granted Dec 3, 2019·1 cites·9 claims
- 1858US9564329B2Method and apparatus for fabricating dielectric structuresAIXTRON INC·Filed 2014·Granted Feb 7, 2017·1 cites·18 claims
- 1956US2016068961A1Method and Apparatus For Growing Binary, Ternary and Quaternary Materials on a SubstrateAIXTRON SE·Filed 2014·Application pending·0 cites
- 2050US2020203197A1Multi-station processing chamber for semiconductorPIOTECH CO LTD·Filed 2019·Application pending·0 cites
- 2147US2025127521A1Medical Auxiliary Device for Joint Bone Replacement SurgeryLU HSIEN TSUNG·Filed 2024·Application pending·0 cites
- 2247US2021305019A1Double-sided deposition apparatus and methodPIOTECH INC·Filed 2021·Application pending·0 cites
- 2332US11224452B2Medical assistive device for quick positioning of reduction forcepsLU HSIEN TSUNG·Filed 2019·Granted Jan 18, 2022·0 cites·10 claims
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