Inventor · disambiguated record
Takao Kariya
Also filed as: KARIYA TAKAO
34 granted patents·1 pending application·1,250 citations·filing 1986–2007
98Inventor score
Files withCANON KK35
Top patents by PatentIndex Score
35 records- 0195US5153898AX-ray reduction projection exposure system of reflection typeCANON KK·Filed 1992·Granted Oct 6, 1992·158 cites·71 claims
- 0293US4993696AMovable stage mechanismCANON KK·Filed 1987·Granted Feb 19, 1991·94 cites·21 claims
- 0392US5182615AExposure apparatusCANON KK·Filed 1990·Granted Jan 26, 1993·79 cites·12 claims
- 0491US5577552ATemperature controlling device for mask and wafer holdersCANON KK·Filed 1995·Granted Nov 26, 1996·95 cites·4 claims
- 0588US5026239AMask cassette and mask cassette loading deviceCANON KK·Filed 1989·Granted Jun 25, 1991·81 cites·13 claims
- 0688US4963921ADevice for holding a maskCANON KK·Filed 1989·Granted Oct 16, 1990·48 cites·15 claims
- 0785US5498501AExposure methodCANON KK·Filed 1995·Granted Mar 12, 1996·59 cites·25 claims
- 0882US5524131AAlignment apparatus and SOR x-ray exposure apparatus having sameCANON KK·Filed 1995·Granted Jun 4, 1996·46 cites·20 claims
- 0981US5172402AExposure apparatusCANON KK·Filed 1991·Granted Dec 15, 1992·33 cites·18 claims
- 1081US4667110AApparatus for holding an object by use of electrostatic attracting forceCANON KK·Filed 1986·Granted May 19, 1987·25 cites·11 claims
- 1179US5285488AExposure apparatusCANON KK·Filed 1992·Granted Feb 8, 1994·33 cites·22 claims
- 1279US5164974AX-ray exposure apparatusCANON KK·Filed 1991·Granted Nov 17, 1992·34 cites·19 claims
- 1377US5822389AAlignment apparatus and SOR X-ray exposure apparatus having sameCANON KK·Filed 1995·Granted Oct 13, 1998·36 cites·5 claims
- 1477US5377251AExposure apparatusCANON KK·Filed 1994·Granted Dec 27, 1994·26 cites·8 claims
- 1575US5150391AExposure apparatusCANON KK·Filed 1992·Granted Sep 22, 1992·28 cites·5 claims
- 1675US5128975AX-ray exposure systemCANON KK·Filed 1991·Granted Jul 7, 1992·28 cites·18 claims
- 1774US5066131AStage mechanismCANON KK·Filed 1989·Granted Nov 19, 1991·25 cites·20 claims
- 1871US4830498APosition detecting deviceCANON KK·Filed 1988·Granted May 16, 1989·23 cites·17 claims
- 1970US5566922AGate valve deviceCANON KK·Filed 1995·Granted Oct 22, 1996·29 cites·6 claims
- 2070US5317615AExposure apparatusCANON KK·Filed 1992·Granted May 31, 1994·22 cites·22 claims
- 2168US5131022AExposure method and apparatusCANON KK·Filed 1991·Granted Jul 14, 1992·20 cites·14 claims
- 2267US5112133AAlignment systemCANON KK·Filed 1991·Granted May 12, 1992·42 cites·11 claims
- 2365US5356686AX-ray mask structureCANON KK·Filed 1994·Granted Oct 18, 1994·22 cites·6 claims
- 2465US5172403AX-ray exposure apparatusCANON KK·Filed 1990·Granted Dec 15, 1992·19 cites·14 claims
- 2561US5267292AX-ray exposure apparatusCANON KK·Filed 1993·Granted Nov 30, 1993·16 cites·15 claims
- 2661US4785187AAlignment deviceCANON KK·Filed 1987·Granted Nov 15, 1988·25 cites·6 claims
- 2757US5168512AMethod of manufacture of semiconductor devicesCANON KK·Filed 1991·Granted Dec 1, 1992·26 cites·25 claims
- 2856US5390227AExposure apparatusCANON KK·Filed 1993·Granted Feb 14, 1995·12 cites·17 claims
- 2950US5160961ASubstrate holding deviceCANON KK·Filed 1991·Granted Nov 3, 1992·19 cites·19 claims
- 3050US2009246585A1Cell structure of fuel cell and fuel cell stackCANON KK·Filed 2007·Application pending·0 cites
- 3147US5226523AConveying apparatus and method of controlling the sameCANON KK·Filed 1992·Granted Jul 13, 1993·8 cites·10 claims
- 3247US5161176AExposure apparatusCANON KK·Filed 1991·Granted Nov 3, 1992·8 cites·7 claims
- 3344US5277539ASubstrate conveying apparatusCANON KK·Filed 1993·Granted Jan 11, 1994·14 cites·9 claims
- 3440US5687947AMounting methodCANON KK·Filed 1995·Granted Nov 18, 1997·8 cites·3 claims
- 3538US5641264ASubstrate conveying device and method of controlling the sameCANON KK·Filed 1992·Granted Jun 24, 1997·9 cites·11 claims
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