Inventor · disambiguated record
Furman Y. Sorrell
Also filed as: SORRELL FURMAN Y
4 granted patents·176 citations·filing 1983–1992
81Inventor score
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4 records- 0191US5418885AThree-zone rapid thermal processing system utilizing wafer edge heating meansUNIV NORTH CAROLINA STATE·Filed 1992·Granted May 23, 1995·92 cites·19 claims
- 0271US5155337AMethod and apparatus for controlling rapid thermal processing systemsUNIV NORTH CAROLINA STATE·Filed 1989·Granted Oct 13, 1992·42 cites·13 claims
- 0357US5253324AConical rapid thermal processing apparatusUNIV NORTH CAROLINA STATE·Filed 1992·Granted Oct 12, 1993·30 cites·31 claims
- 0447US4543822AElectromagnetic shearflowmeter for remote oceanic applicationsSEAMETRICS INC·Filed 1983·Granted Oct 1, 1985·12 cites·5 claims
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