Inventor · disambiguated record
Hisao Izawa
Also filed as: IZAWA HISAO
6 granted patents·97 citations·filing 1984–1995
82Inventor score
Top patents by PatentIndex Score
6 records- 0184US4636626AApparatus for aligning mask and wafer used in semiconductor circuit element fabricationNIPPON KOGAKU KK·Filed 1984·Granted Jan 13, 1987·38 cites·25 claims
- 0269US5539521AMethod of and apparatus for measuring pattern positionsNIKON CORP·Filed 1995·Granted Jul 23, 1996·28 cites·25 claims
- 0359US4598242AMask feed method and apparatus for exposure replicate systemsNIPPON KOGAKU KK·Filed 1984·Granted Jul 1, 1986·15 cites·8 claims
- 0455US5459577AMethod of and apparatus for measuring pattern positionsNIKON CORP·Filed 1994·Granted Oct 17, 1995·15 cites·20 claims
- 0529US4537501AApparatus for the attitude control of plate-form bodyNIPPON KOGAKU KK·Filed 1984·Granted Aug 27, 1985·0 cites·10 claims
- 0626US4685805ASmall gap measuring apparatusNIPPON KOGAKU KK·Filed 1985·Granted Aug 11, 1987·1 cites·10 claims
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