Inventor · disambiguated record
Theodorus Marcus Nagtegaal
Also filed as: NAGTEGAAL THEODORUS MARCUS
2 granted patents·0 citations·filing 2019–2020
23Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0155US11860554B2Object positioner, method for correcting the shape of an object, lithographic apparatus, object inspection apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Jan 2, 2024·0 cites·20 claims
- 0242US11556064B2Stage apparatus and method for calibrating an object loading processASML NETHERLANDS BV·Filed 2019·Granted Jan 17, 2023·0 cites·18 claims
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