Inventor · disambiguated record
Guey-Shyung Cho
Also filed as: CHO GUEY-SHYUNG
3 granted patents·596 citations·filing 1999–2001
78Inventor score
Files withTAIWAN SEMICONDUCTOR MFG3
Top patents by PatentIndex Score
3 records- 0196US6435865B1Apparatus and method for positioning gas injectors in a vertical furnaceTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Aug 20, 2002·529 cites·20 claims
- 0268US6340933B1Semiconductor wafer transport pod having cover latch indicatorTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Jan 22, 2002·45 cites·17 claims
- 0357US6168427B1Apparatus for guiding the removal of a processing tube from a semiconductor furnaceTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Jan 2, 2001·22 cites·18 claims
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