Inventor · disambiguated record
Irina I. Pozhinskaya
Also filed as: POZHINSKAYA IRINA · POZHINSKAYA IRINA I
3 granted patents·12 citations·filing 2004–2009
61Inventor score
Top patents by PatentIndex Score
3 records- 0181US7633689B2Catadioptric optical system for scatterometryASML HOLDING NV·Filed 2007·Granted Dec 15, 2009·11 cites·17 claims
- 0243US7405802B2Large field of view 2X magnification projection optical system for FPD manufactureASML HOLDING NV·Filed 2004·Granted Jul 29, 2008·1 cites·51 claims
- 0338US8107173B2Catadioptric optical system for scatterometrySHMAREV YEVGENIY KONSTANITINOVICH·Filed 2009·Granted Jan 31, 2012·0 cites·12 claims
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