Inventor · disambiguated record
Min Sung Han
Also filed as: HAN MIN SUNG
6 granted patents·6 pending applications·16 citations·filing 2016–2023
72Inventor score
Technology areasH10P
Files withSEMES CO LTD12
Top patents by PatentIndex Score
12 records- 0193US10197333B2Method and apparatus for drying substrateSEMES CO LTD·Filed 2016·Granted Feb 5, 2019·14 cites·16 claims
- 0284US12176185B2Apparatus and method for processing substrate using plasmaSEMES CO LTD·Filed 2022·Granted Dec 24, 2024·1 cites·19 claims
- 0367US10964557B2Substrate processing apparatus and substrate processing methodSEMES CO LTD·Filed 2018·Granted Mar 30, 2021·1 cites·16 claims
- 0456US12237151B2Apparatus and method for processing substrate using plasmaSEMES CO LTD·Filed 2022·Granted Feb 25, 2025·0 cites·13 claims
- 0550US2023207248A1Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2022·Application pending·0 cites
- 0649US2023144896A1Substrate treating apparatus and semiconductor manufacturing equipment including the sameSEMES CO LTD·Filed 2022·Application pending·0 cites
- 0748US11978654B2Substrate processing apparatusSEMES CO LTD·Filed 2020·Granted May 7, 2024·0 cites·20 claims
- 0848US2024021412A1Substrate processing apparatus and substrate processing methodSEMES CO LTD·Filed 2023·Application pending·0 cites
- 0946US2023352275A1Apparatus and method for processing substrateSEMES CO LTD·Filed 2022·Application pending·0 cites
- 1045US11167326B2Substrate processing apparatus and nozzle unitSEMES CO LTD·Filed 2019·Granted Nov 9, 2021·0 cites·10 claims
- 1142US2023144685A1Apparatus for processing substrateSEMES CO LTD·Filed 2022·Application pending·0 cites
- 1235US2017345686A1Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2017·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →