Inventor · disambiguated record
Takafumi Matsuhashi
Also filed as: MATSUHASHI TAKAFUMI
4 granted patents·1 pending application·4 citations·filing 2019–2023
60Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0178US11086286B2Substrate processing system, substrate processing method, and control programTOKYO ELECTRON LTD·Filed 2019·Granted Aug 10, 2021·3 cites·15 claims
- 0268US11127615B2Substrate processing system and substrate transfer methodTOKYO ELECTRON LTD·Filed 2019·Granted Sep 21, 2021·1 cites·19 claims
- 0356US2024213064A1Substrate processing system, control device, and substrate transfer processing methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0455US11908712B2Semiconductor manufacturing apparatus, substrate transfer method, and programTOKYO ELECTRON LTD·Filed 2021·Granted Feb 20, 2024·0 cites·8 claims
- 0550US12062559B2Substrate processing system, substrate processing method, and control programTOKYO ELECTRON LTD·Filed 2021·Granted Aug 13, 2024·0 cites·12 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →