Inventor · disambiguated record
In-Sung Kim
Also filed as: KIM IN · KIM IN-SUNG
24 granted patents·6 pending applications·132 citations·filing 1995–2016
94Inventor score
Top patents by PatentIndex Score
30 records- 0190US7475383B2Method of fabricating photo maskSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Jan 6, 2009·16 cites·20 claims
- 0285US9116438B2Method of correcting flare and method of preparing extreme ultra violet maskLEE YOUNG-MI·Filed 2012·Granted Aug 25, 2015·8 cites·16 claims
- 0375US9645484B2Reflective masks for use in extreme ultraviolet lithography apparatus and methods of manufacturing the sameKIM SEONG-SUE·Filed 2015·Granted May 9, 2017·2 cites·18 claims
- 0474US5547883AMethod for fabricating thin film transistorLG SEMICON CO LTD·Filed 1995·Granted Aug 20, 1996·39 cites·13 claims
- 0572US7022438B2Photomask for forming small contact hole array and methods of fabricating and using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Apr 4, 2006·12 cites·12 claims
- 0672US6893779B2Phase shifting mask for manufacturing semiconductor device and method of fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted May 17, 2005·13 cites·15 claims
- 0768US7501327B2Fabricating method of semiconductor optical device for flip-chip bondingSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Mar 10, 2009·2 cites·8 claims
- 0868US7300746B2Photomask for forming small contact hole array and methods of fabricating and using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Nov 27, 2007·2 cites·8 claims
- 0968US6716746B1Semiconductor device having self-aligned contact and method of fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Apr 6, 2004·16 cites·13 claims
- 1062US7361433B2Photomask for forming photoresist patterns repeating in two dimensions and method of fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Apr 22, 2008·9 cites·18 claims
- 1161US7384711B2Stencil mask having main and auxiliary strut and method of forming the sameSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Jun 10, 2008·5 cites·15 claims
- 1260US8006202B2Systems and methods for UV lithographyIMEC·Filed 2008·Granted Aug 23, 2011·1 cites·25 claims
- 1354US7635547B2Stencil mask having main and auxiliary strut and method of forming the sameSAMSUNG ELECTRONICS CO LTD·Filed 2008·Granted Dec 22, 2009·0 cites·36 claims
- 1450US7288422B2Photonic integrated device using reverse-mesa structure and method for fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Oct 30, 2007·2 cites·13 claims
- 1549US7473497B2Phase shifting mask for manufacturing semiconductor device and method of fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Jan 6, 2009·0 cites·9 claims
- 1648US8599360B2Reflective reticle chuck, reflective illumination system including the same, method of controlling flatness of reflective reticle using the chuck, and method of manufacturing semiconductor device using the chuckHEO JIN-SEOK·Filed 2010·Granted Dec 3, 2013·0 cites·11 claims
- 1747US9658522B2Reflective extreme ultraviolet maskSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted May 23, 2017·0 cites·14 claims
- 1846US8119309B2Reflective photomask and method of fabricating, reflective illumination system and method of process using the sameLEE DONG-GUN·Filed 2010·Granted Feb 21, 2012·0 cites·19 claims
- 1944US2014213054A1Exposing method and method of forming a pattern using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2014·Application pending·0 cites
- 2044US2009004718A1Antioxidant Fermenting Microorganism Agent Reducing Volatile Organic Compounds From Polyurethane Foam, and Urethane Foam Comprising the SameDYMOS INC·Filed 2007·Application pending·0 cites
- 2143US7127134B2Semiconductor optical deviceSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Oct 24, 2006·0 cites·14 claims
- 2242US8287792B2Methods of forming fine patterns using a nanoimprint lithographyLEE JEONG-HOON·Filed 2010·Granted Oct 16, 2012·0 cites·11 claims
- 2341US2007264584A1Pattern arrangement method of semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2007·Application pending·0 cites
- 2440US2014264089A1Apparatus and method for generating extreme ultra violet radiationSAMSUNG ELECTRONICS CO LTD·Filed 2013·Application pending·0 cites
- 2539US9791788B2Method of manufacturing a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Oct 17, 2017·0 cites·20 claims
- 2637US6492701B1Semiconductor device having anti-reflective cap and spacer, method of manufacturing the same, and method of manufacturing photoresist pattern using the sameSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Dec 10, 2002·5 cites·12 claims
- 2734US2011294074A1Exposure apparatus and exposing method using the apparatusLEE JI-EUN·Filed 2011·Application pending·0 cites
- 2833US2010230864A1Nanoimprint Lithography Template and Method of Fabricating Semiconductor Device Using the SamePARK CHANG-MIN·Filed 2010·Application pending·0 cites
- 2929US9867267B2Extreme ultraviolet light source deviceLEE SEUNG-KOO·Filed 2015·Granted Jan 9, 2018·0 cites·20 claims
- 3027US8158958B2Flare evaluation methodsKIM IN-SUNG·Filed 2010·Granted Apr 17, 2012·0 cites·20 claims
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