Inventor · disambiguated record
Fon-Shan Huang
Also filed as: HUANG FON-SHAN
2 granted patents·1 pending application·8 citations·filing 2001–2007
54Inventor score
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3 records- 0159US7214611B2Imprinting-damascene process for metal interconnectionUNIV TSINGHUA·Filed 2005·Granted May 8, 2007·4 cites·9 claims
- 0246US6511609B2Cu seed layer deposition for ULSI metalizationIND TECH RES INST·Filed 2001·Granted Jan 28, 2003·4 cites·8 claims
- 0337US2008131822A1Method of fabricating imprint lithography templateUNIV TSINGHUA·Filed 2007·Application pending·0 cites
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