Inventor · disambiguated record

Samee Ur-Rehman

Also filed as: UR-REHMAN SAMEE

1 granted patent·2 citations·filing 2019–2019

20Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0181US10656534B2Method of measuring, device manufacturing method, metrology apparatus, and lithographic systemASML NETHERLANDS BV·Filed 2019·Granted May 19, 2020·2 cites·20 claims

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