Inventor · disambiguated record

Yao-Fey Chuang

Also filed as: CHUANG YAO-FEY

1 granted patent·1 citations·filing 2000–2000

16Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0140US6595370B2Apparatus and method for reducing contamination in a wafer transfer chamberTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Jul 22, 2003·1 cites·20 claims

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