Inventor · disambiguated record

Hikaru Kikuchi

Also filed as: KIKUCHI HIKARU

2 granted patents·1 pending application·0 citations·filing 2017–2023

22Inventor score

Technology areasH10P H01J

Files withTOKYO ELECTRON LTD2 YAMAGUCHI PREFECTURAL INDUSTRIAL TECH INSTITUTE1

Top patents by PatentIndex Score

3 records

0154US2024212996A1Substrate support and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
0236US10768089B2Particle collecting apparatus and particle collecting systemTOKYO ELECTRON LTD·Filed 2017·Granted Sep 8, 2020·0 cites·11 claims
0335US12276037B2Anodized titanium material and method for producing the sameYAMAGUCHI PREFECTURAL INDUSTRIAL TECH INSTITUTE·Filed 2021·Granted Apr 15, 2025·0 cites·7 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →