Inventor · disambiguated record

Shigeyuki Furuya

Also filed as: FURUYA SHIGEYUKI

2 granted patents·6 citations·filing 2001–2020

44Inventor score

Technology areasH10P

Files withEBARA CORP1 SANYO ELECTRIC CO1

Top patents by PatentIndex Score

2 records

0152US6861372B2Semiconductor device manufacturing methodSANYO ELECTRIC CO·Filed 2001·Granted Mar 1, 2005·6 cites·12 claims
0245US11633828B2Substrate polishing system, substrate polishing method and substrate polishing apparatusEBARA CORP·Filed 2020·Granted Apr 25, 2023·0 cites·8 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →