Inventor · disambiguated record

Masaharu Motohashi

Also filed as: MOTOHASHI MASAHARU

1 granted patent·27 citations·filing 2001–2001

43Inventor score

Technology areasH10P

Files withHITACHI TOKYO ELECTRONICS1

Top patents by PatentIndex Score

1 record

0172US6664549B2Wafer chuck, exposure system, and method of manufacturing semiconductor deviceHITACHI TOKYO ELECTRONICS·Filed 2001·Granted Dec 16, 2003·27 cites·10 claims

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