Inventor · disambiguated record

Tomonori Shin

Also filed as: SHIN TOMONORI

1 granted patent·4 citations·filing 2008–2008

23Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0168US7844359B2Coating and developing apparatus, operating method for same, and storage medium for the methodTOKYO ELECTRON LTD·Filed 2008·Granted Nov 30, 2010·4 cites·13 claims

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