Inventor · disambiguated record
Rikio Tomiyoshi
Also filed as: TOMIYOSHI RIKIO
10 granted patents·5 pending applications·537 citations·filing 1993–2009
90Inventor score
Top patents by PatentIndex Score
15 records- 0198US6850854B2Semiconductor production systemHITACHI LTD·Filed 2003·Granted Feb 1, 2005·294 cites·9 claims
- 0298US6591207B2Semiconductor production systemHITACHI LTD·Filed 2001·Granted Jul 8, 2003·217 cites·14 claims
- 0379US7218985B2Semiconductor manufacturing apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted May 15, 2007·5 cites·8 claims
- 0475US8153996B2Pattern forming apparatus and pattern forming methodABE TAKAYUKI·Filed 2009·Granted Apr 10, 2012·5 cites·3 claims
- 0569US7027888B2Semiconductor manufacturing apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 11, 2006·2 cites·2 claims
- 0657US7526352B2Semiconductor production systemHITACHI LTD·Filed 2008·Granted Apr 28, 2009·0 cites·6 claims
- 0757US6941186B2Semiconductor manufacturing apparatusHITACHI HIGH TECH CORP·Filed 2003·Granted Sep 6, 2005·4 cites·15 claims
- 0854US2007027569A1Semiconductor production systemNAYA HIDEMITSU·Filed 2006·Application pending·0 cites
- 0953US7099733B2Semiconductor production systemHITACHI HIGH TECH CORP·Filed 2004·Granted Aug 29, 2006·3 cites·15 claims
- 1052US7177718B2Semiconductor production systemHITACHI HIGH TECH CORP·Filed 2006·Granted Feb 13, 2007·0 cites·6 claims
- 1147US2006033050A1Electron-beam drawing apparatus and electron-beam drawing methodANDO KIMIAKI·Filed 2005·Application pending·0 cites
- 1245US5384466AElectron beam lithography apparatus and a method thereofHITACHI LTD·Filed 1993·Granted Jan 24, 1995·7 cites·15 claims
- 1345US2004178366A1Electron-beam drawing apparatus and electron-beam drawing methodHITACHI LTD·Filed 2004·Application pending·0 cites
- 1445US2005119843A1Semiconductor production systemFiled 2004·Application pending·0 cites
- 1542US2002024020A1Electron-beam drawing appraratus electron-beam drawing methodFiled 2001·Application pending·0 cites
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