Inventor · disambiguated record

Qingyan Han

Also filed as: HAN QINGYAN

2 granted patents·96 citations·filing 1999–2001

68Inventor score

Technology areasH10P

Files withAXCELIS TECH INC1 EATON CORP1

Top patents by PatentIndex Score

2 records

0191US6638875B2Oxygen free plasma stripping processAXCELIS TECH INC·Filed 2001·Granted Oct 28, 2003·69 cites·6 claims
0260US6492186B1Method for detecting an endpoint for an oxygen free plasma processEATON CORP·Filed 1999·Granted Dec 10, 2002·27 cites·32 claims

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