Inventor · disambiguated record
Mahdi Sadeghinia
Also filed as: SADEGHINIA MAHDI
1 granted patent·1 pending application·2 citations·filing 2018–2018
19Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0178US11226567B2Methods and apparatus for use in a device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jan 18, 2022·2 cites·20 claims
- 0236US2019041758A1Methods of determining a mechanical property of a layer applied to a substrate, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
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