Inventor · disambiguated record
Takashi Miyamatsu
Also filed as: MIYAMATSU TAKASHI
2 granted patents·17 citations·filing 2004–2005
58Inventor score
Files withJSR CORP2
Top patents by PatentIndex Score
2 records- 0176US7580111B2Liquid for immersion exposure and immersion exposure methodJSR CORP·Filed 2005·Granted Aug 25, 2009·5 cites·18 claims
- 0249US7371503B2Sulfonium salt compound, photoacid generator, and positive-tone radiation-sensitive resin compositionJSR CORP·Filed 2004·Granted May 13, 2008·12 cites·20 claims
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