Inventor · disambiguated record
Yukihiro Yokota
Also filed as: YOKOTA YUKIHIRO
4 granted patents·5 citations·filing 2001–2020
64Inventor score
Files withCANON KK4
Top patents by PatentIndex Score
4 records- 0160US7453570B2Mark position measuring method and apparatusCANON KK·Filed 2007·Granted Nov 18, 2008·1 cites·7 claims
- 0259US11521845B2Lamp device, exposure apparatus, and method of manufacturing articleCANON KK·Filed 2020·Granted Dec 6, 2022·0 cites·18 claims
- 0344US6604011B2Reticle chuck in exposure apparatus and semiconductor device manufacturing method using the sameCANON KK·Filed 2001·Granted Aug 5, 2003·3 cites·12 claims
- 0443US7310146B2Mark position measuring method and apparatusCANON KK·Filed 2004·Granted Dec 18, 2007·1 cites·11 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →