Inventor · disambiguated record
George J. Hefferon
Also filed as: HEFFERON GEORGE J · HEFFERON GEORGE JOSEPH
7 granted patents·427 citations·filing 1987–1997
90Inventor score
Top patents by PatentIndex Score
7 records- 0194US6057080ATop antireflective coating filmIBM·Filed 1997·Granted May 2, 2000·86 cites·17 claims
- 0294US4908298AMethod of creating patterned multilayer films for use in production of semiconductor circuits and systemsIBM·Filed 1987·Granted Mar 13, 1990·108 cites·15 claims
- 0390US5744537AAntireflective coating filmsIBM·Filed 1997·Granted Apr 28, 1998·72 cites·5 claims
- 0488US4939070AThermally stable photoresists with high sensitivityBRUNSVOLD WILLIAM R·Filed 1988·Granted Jul 3, 1990·86 cites·15 claims
- 0585US5609989AAcid scavengers for use in chemically amplified photoresistsIBM·Filed 1995·Granted Mar 11, 1997·47 cites·11 claims
- 0662US5667938AAcid scavengers for use in chemically amplified photoresistsIBM·Filed 1996·Granted Sep 16, 1997·15 cites·6 claims
- 0756US5733705AAcid Scavengers for use in chemically amplified photoresistsIBM·Filed 1996·Granted Mar 31, 1998·13 cites·7 claims
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