Inventor · disambiguated record

Reika Ko

Also filed as: KO REIKA

1 granted patent·446 citations·filing 2009–2009

58Inventor score

Technology areasH10P

Files withMATSUMOTO NAOKI1

Top patents by PatentIndex Score

1 record

0195US9263298B2Plasma etching apparatus and plasma etching methodMATSUMOTO NAOKI·Filed 2009·Granted Feb 16, 2016·446 cites·7 claims

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