Inventor · disambiguated record

Shigekazu Ueno

Also filed as: UENO SHIGEKAZU

1 granted patent·0 citations·filing 2008–2008

6Inventor score

Technology areasH01J

Files withSASAKAWA EISHIRO1

Top patents by PatentIndex Score

1 record

0137US8529704B2Vacuum processing apparatus and operating method for vacuum processing apparatusSASAKAWA EISHIRO·Filed 2008·Granted Sep 10, 2013·0 cites·6 claims

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Shigekazu Ueno — Patent Inventor | PatentIndex