Inventor · disambiguated record
Luberthus Ouwehand
Also filed as: OUWEHAND LUBERTHUS
4 granted patents·2 pending applications·166 citations·filing 2004–2008
79Inventor score
Files withASML NETHERLANDS BV6
Top patents by PatentIndex Score
6 records- 0195US7333174B2Lithographic apparatus and method for determining Z position errors/variations and substrate table flatnessASML NETHERLANDS BV·Filed 2005·Granted Feb 19, 2008·140 cites·25 claims
- 0286US7411667B2Method for correcting disturbances in a level sensor light pathASML NETHERLANDS BV·Filed 2005·Granted Aug 12, 2008·11 cites·17 claims
- 0382US7542127B2Lithographic apparatus and method for manufacturing a deviceASML NETHERLANDS BV·Filed 2005·Granted Jun 2, 2009·7 cites·29 claims
- 0474US7751059B2Method for correcting disturbances in a level sensor light pathASML NETHERLANDS BV·Filed 2006·Granted Jul 6, 2010·8 cites·16 claims
- 0551US2008309915A1Method for correcting disturbances in a level sensor light pathASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 0642US2006139595A1Lithographic apparatus and method for determining Z position errors/variations and substrate table flatnessASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →