Inventor · disambiguated record

Yung-Tai Tseng

Also filed as: TSENG YUNG-TAI

1 granted patent·42 citations·filing 1999–1999

47Inventor score

Technology areasB24B

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0171US6206760B1Method and apparatus for preventing particle contamination in a polishing machineTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Mar 27, 2001·42 cites·25 claims

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