Inventor · disambiguated record
Jenq-Yann Tsay
Also filed as: TSAY JENQ-YANN
1 granted patent·1 pending application·25 citations·filing 2002–2002
42Inventor score
Files withTAIWAN SEMICONDUCTOR MFG2
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2 records- 0174US6815653B2Method and apparatus for early detection of material accretion and peeling in plasma systemTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Nov 9, 2004·25 cites·14 claims
- 0230US2003198542A1Cassette pod stage equipped with locked guide pinsTAIWAN SEMICONDUCTOR MFG·Filed 2002·Application pending·0 cites
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