Inventor · disambiguated record
Lutz Aschke
Also filed as: ASCHKE LUTZ
6 granted patents·3 pending applications·47 citations·filing 2002–2010
82Inventor score
Top patents by PatentIndex Score
9 records- 0183US8416500B2Device and method for beam formingMITRA THOMAS·Filed 2009·Granted Apr 9, 2013·11 cites·14 claims
- 0268US7129010B2Substrates for in particular microlithographySCHOTT AG·Filed 2003·Granted Oct 31, 2006·13 cites·24 claims
- 0364US8639071B2Device for forming laser radiationASCHKE LUTZ·Filed 2010·Granted Jan 28, 2014·4 cites·12 claims
- 0460US7279252B2Substrate for the micro-lithography and process of manufacturing thereofSCHOTT AG·Filed 2004·Granted Oct 9, 2007·9 cites·21 claims
- 0556US7517617B2Mask blank for use in EUV lithography and method for its productionSCHOTT AG·Filed 2004·Granted Apr 14, 2009·6 cites·33 claims
- 0651US6856395B2Reflectometer arrangement and method for determining the reflectance of selected measurement locations of measurement objects reflecting in a spectrally dependent mannerAIXUV GMBH·Filed 2002·Granted Feb 15, 2005·4 cites·11 claims
- 0739US2006008749A1Method for manufacturing of a mask blank for EUV photolithography and mask blankSOBEL FRANK·Filed 2004·Application pending·0 cites
- 0835US2004231971A1Photo mask blank, photo mask, method and apparatus for manufacturing of a photo mask blankFiled 2004·Application pending·0 cites
- 0933US2006115744A1Method of producing a mask blank for photolithographic applications, and mask blankASCHKE LUTZ·Filed 2005·Application pending·0 cites
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