Inventor · disambiguated record
J. Patrick Rymer
Also filed as: RYMER J PATRICK
2 granted patents·31 citations·filing 2000–2002
63Inventor score
Technology areasH10P
Files withNOVELLUS SYSTEMS INC2
Top patents by PatentIndex Score
2 records- 0175US6541371B1Apparatus and method for depositing superior Ta(N)/copper thin films for barrier and seed applications in semiconductor processingNOVELLUS SYSTEMS INC·Filed 2000·Granted Apr 1, 2003·17 cites·36 claims
- 0273US6905959B1Apparatus and method for depositing superior Ta (N) copper thin films for barrier and seed applications in semiconductor processingNOVELLUS SYSTEMS INC·Filed 2002·Granted Jun 14, 2005·14 cites·5 claims
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