Inventor · disambiguated record
Ki-Hyun Chyun
Also filed as: CHYUN KI-HYUN
3 granted patents·1 pending application·1 citations·filing 1996–2007
46Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0141US7693682B2Method for measuring critical dimensions of a pattern using an overlay measuring apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted Apr 6, 2010·0 cites·5 claims
- 0241US7594969B2Device for controlling dispensing error in photo spinner equipmentSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Sep 29, 2009·0 cites·4 claims
- 0335US2006010710A1System and method of detecting misaligned waferPARK CHAN-HOON·Filed 2005·Application pending·0 cites
- 0425US5791709ASemiconductor manufacturing apparatus having suctorial means for handling wafersSAMSUNG ELECTRONICS CO LTD·Filed 1996·Granted Aug 11, 1998·1 cites·11 claims
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